Piezo/Stage "High-Performance Piezo Stage"

It boasts a robust construction with high rigidity and high precision positioning accuracy.

Piezo System Jena's piezo actuators are robustly built and boast high rigidity and high precision positioning accuracy. They are used in a wide range of applications, including compact XYZ three-axis stages, tilt mirrors, stack-type objective lenses, and fiber switches for slits. There are also models that utilize strain gauge sensors, inductive sensors, and capacitive sensors for feedback control. They are widely used in fields that require high positional accuracy, such as optical alignment, interferometers, precision machining, precision measurement, and semiconductor-related devices. The dedicated drivers are also high-performance and low-noise (3mVP-P), enabling high resolution. For applications that require particularly low noise, we also offer an ultra-low noise driver with 200NV. 【Product Lineup】 ○ Objective Lens Focusing Actuator ○ High Rigidity Orientation-Free Stage ○ High Rigidity Thin High Straightness Stage (X, X-Y Stage) For more details, please contact us or download the catalog.

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