This is a vacuum pump unit with internal heat diffusion that achieves energy saving and high efficiency.
With the oil level gauge, you can easily check the oil quantity and dirt at a glance. Additionally, for maintenance, simply performing an early oil change is sufficient. This also improves work efficiency. 【Features】 ○ The oil heating heater uses an internal heat sheath heater, achieving energy savings. ○ Improved jet design significantly enhances exhaust performance. ○ Reduced pump startup time. ○ By integrating a direct water-cooled cold cap into the baffle, it is now possible to suppress oil back even with water cooling. For more details, please contact us or download the catalog.
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basic information
【Specifications】 [SFD-22C / SFD-26C] ○ Heater Power (KW): 7.8 / 10.8 ○ Heater Efficiency (%): 93 / 93 ○ Exhaust Speed (m³/sec): 6.5 / 10 ○ Critical Back Pressure (Pa): 27 / 31 ○ Reachable Pressure (Pa): 3×10-5 / 3×10-5 ○ Required Power φ3 200V (kW): 7.8 / 10.8 ○ Operating Oil (L): 5 / 6 ○ Cooling Water Flow (L/min): 12 / 16 ○ Startup Time (min): 35 / 15 ○ Cooling Time (min): 20 / 60 ○ Main Body + Baffle Weight (kg): 260 / 386 ● For more details, please contact us or download the catalog.
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Company information
Showa Vacuum Co., Ltd. manufactures and sells vacuum technology application devices (vacuum equipment) such as vacuum deposition devices and sputtering devices, primarily focused on equipment that forms thin films on specific substrates in a vacuum.
