Efficient surface cleaning and modification with excimer light!
Organic material cleaning and surface modification can be performed at low temperatures using a high photon energy vacuum ultraviolet light source excimer lamp. The flat type is a high-output, high-density, high-distribution model where the surface itself emits light.
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basic information
Efficient cleaning of organic materials and surface modification is possible with 172nm light. Features: Quasi-monochromatic light: Offers good energy exchange efficiency and does not cause thermal damage to the workpiece. Instant on/off: Allows for instantaneous on and off, enabling illumination only when necessary.
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Applications/Examples of results
Applications UV Ozone Cleaning Dry Etching / Soft Ashing UV Annealing Surface Modification Resist Residue Removal
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Company information
Quark Technology Co., Ltd. manufactures and sells various industrial equipment using cutting-edge optical application technology. Through the development of vacuum ultraviolet and UV-LED light sources, we have introduced manufacturing technologies for semiconductors, new displays such as LCDs, PDPs, films, and EL, as well as various electronic materials and devices. Additionally, we are planning research and development to address the demand for waste and environmental management equipment, which are pressing medical and social issues. All matter is composed of atoms, nucleons, and "quarks." At Quark Technology, we continue to research light and challenge ourselves in industrial application technologies.