Ideal for universities, research, and development! It can be used for wafer cleaning, mask cleaning, and experimental equipment.
The "QEV Series" is a tube-type excimer lamp that offers high customization at a low price. We provide units for batch irradiation and scanning irradiation. The wavelength is 172nm, with a distribution of ±15%. It can be used for wafer cleaning, mask cleaning, and experimental equipment. Please feel free to contact us for inquiries. 【Specifications for Batch Irradiation Unit (Partial)】 ＜QEV-160＞ ■ Wavelength: 172nm ■ Utilities: N2 / Cooling water / AC100V ■ Distribution: ±15% ■ Irradiation aperture: 176×176 ■ Compatible work size: 6inch *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Scan Irradiation Unit Specifications (Partial)】 ＜QEV-150＞ ■Wavelength: 172nm ■Utility: N2 / AC100V ■Distribution: ±15% ■Irradiation Aperture: 172×25 ■Compatible Work Size: Width 150mm ■Illuminance (Maximum at Tube Surface): 50mW/cm2 *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application Examples】 ■ Wafer Cleaning ■ Mask Cleaning ■ Experimental Equipment * For more details, please refer to the PDF document or feel free to contact us.
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Quark Technology Co., Ltd. manufactures and sells various industrial equipment using cutting-edge optical application technology. Through the development of vacuum ultraviolet and UV-LED light sources, we have introduced manufacturing technologies for semiconductors, new displays such as LCDs, PDPs, films, and EL, as well as various electronic materials and devices. Additionally, we are planning research and development to address the demand for waste and environmental management equipment, which are pressing medical and social issues. All matter is composed of atoms, nucleons, and "quarks." At Quark Technology, we continue to research light and challenge ourselves in industrial application technologies.
