1. Low cost 2. Energy saving 3. Compact design
We have developed a high-frequency power supply that incorporates a matching device internally, thanks to our unique mechanism. Compared to conventional products, we have increased the output from 500W to 750W, while reducing the size to fit within a half rack instead of a full rack, achieving thorough compactness.
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basic information
**Features** 1. Low Cost - Achieved low pricing by incorporating a matching device within the high-frequency power supply. - Since the high-frequency power supply can be installed in place of the matching device, racks that housed the high-frequency power supply are no longer necessary. - Cables between the high-frequency power supply and the matching device, as well as cables for powering the matching device, are also unnecessary. 2. Energy Saving - The NRM075A-01 employs a high-efficiency amplifier, achieving an AC-RF conversion efficiency of over 70%. - No cables are needed between the high-frequency power supply and the matching device, eliminating losses due to cable resistance. 3. Compact Design - As a type with an integrated matching device, it is half the size of conventional types. - Local control can be performed with a handheld remote controller, and remote control is possible via analog I/O and serial communication, eliminating the need for complex cable wiring. *Output is available in two types: coaxial cable and copper plate.*
Price range
P5
Delivery Time
Applications/Examples of results
We are being adopted in various industries, including semiconductor manufacturing equipment.
Company information
RF Technologies has been involved in the development and design of high-frequency technologies since the time high-frequency power supplies began to be used in plasma processes, including "demonstration research," "material development," "surface modification," "semiconductor manufacturing," "FPD manufacturing," and "solar cells." Fortunately, we have had the opportunity for technical collaboration and exchange with academic researchers and major semiconductor manufacturing equipment manufacturers at the forefront of global technology. We have experienced many instances where the alignment of our technologies was essential to solving issues that overlap between areas that equipment manufacturers need to address and areas that power supply manufacturers need to resolve.