RF measurement device / Capable of high-precision measurement of RF inside the chamber
- Measurement is possible with an accuracy of 1%. - Measurement is possible with a time resolution of 1μs. - Measurement is possible for multiple frequencies, not just a single frequency (Ocye Poly Octiv Suite). - Ion flux can be measured (Octiv Suite).
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basic information
The Octiv Suite can measure the following RF parameters: - Voltage - Current - Phase - Harmonics - Impedance - Ion flux - Waveform reconstruction
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Applications/Examples of results
Measurement of RF parameters for etching, sputtering, ion plating, etc. Confirmation of the performance of the RF power supply.
Company information
Matsubo provides services in two business areas: [Industrial Machinery & Information] and [Powder Technology], supported by a [Technical Center] backup system. Breaking away from the confines of a specialized machinery trading company, we have established a comprehensive service system to ensure our customers can use our products with confidence, ranging from consulting prior to implementation, engineering related to installation and localization, to maintenance and proposals for improvements and modifications after installation.
