This is a pump with a simple structure designed for general industrial use. 【ULVAC】
The GR Series dry vacuum pumps are designed with a simple structure for general industry, based on the proven and reliable LR and HR series. They can be used for high-load applications such as repeated exhaust from atmospheric pressure to vacuum and continuous operation in high-pressure areas. They are ideal for exhausting load lock chambers that require high throughput. 【Product Lineup】 ○ GR60A ○ GR90A ○ GR180A For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Suitable for high-load applications such as repeated exhaust from atmosphere to vacuum and continuous operation in high-pressure areas. ○ Ideal for exhaust in load lock chambers (loading and unloading chambers) that require high throughput. ○ Compatible with general-purpose induction motors. ○ Special motors such as explosion-proof motors can be installed (optional). ○ Equipped with multi-voltage compatible motors. → Please select between 200V class motors and multi-voltage motors when placing your order (GR180A uses a common motor). ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Vacuum exhaust of clean gases such as air and inert gases ○ Exhaust of loading and unloading chambers in various film deposition devices ○ General industrial applications such as vacuum drying, vacuum gas replacement, and vacuum degassing ○ Vacuum gas replacement for vacuum insulation and gas filling ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.