This is a variety of introduction devices compatible with ultra-high vacuum using UFC flanges. 【ULVAC】
This is a variety of feedthroughs compatible with ultra-high vacuum using UFC flanges (bakeable flanges with knife-edge type metal seal). The CMS series is for current and voltage, the TDU series is for rotational motion, and the TSU series is for linear motion, all designed to introduce these elements into an ultra-high vacuum chamber without leakage from the atmosphere. The TVU series is a viewport for observing the interior of the ultra-high vacuum chamber from the atmosphere with a wide field of view. 【Product Lineup】 ○ Current feedthrough terminal: CMS series ○ Ultra-high vacuum rotary feedthrough terminal: TDU series ○ Ultra-high vacuum linear feedthrough terminal: TSU series ○ Ultra-high vacuum zero-length viewport: TVU series For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Ultra-high vacuum compatible → Ideal for ultra-high vacuum due to its clean structure with minimal gas release. ○ Bakeable design → Leak-tight due to the bakeable sealing structure. [CMS Series] ○ Wide pressure range compatibility → Usable from 10^-2 Pa to ultra-high vacuum regions. ○ Rich lineup → Various options including BNC connector type for microcurrents, high current, and high voltage. [TDU/TSU Series] ○ Easy fixation → Handle can be fixed at any position. ○ Low gas release structure → Shaft seals use stainless steel welded bellows, and bearings in vacuum are clean and non-lubricated (TDU series). → TSU series has bearings placed on the atmospheric side. ○ High operability → The rotation ratio of the handle to the rotating shaft is 1:1, allowing for reading of rotation (forward and reverse) angles (TDU series). → With a stroke of 1mm per handle rotation, fine adjustments are possible (TSU series). [TVU Series] ○ Zero length and slim design → The window section has a zero-length structure from the flange, achieving a wide effective visible diameter. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Various ultra-high vacuum devices ○ Various research and development equipment ○ Various film deposition devices ○ Other general vacuum equipment ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.