This is a power supply compatible with electron beam evaporation sources, aimed at stabilizing the circuit and improving performance. [ULVAC]
The HPS-N series is a power supply compatible with electron beam evaporation sources, designed to stabilize circuits and improve performance based on Ulvac's many years of accumulated technology and achievements. By using it in combination with the EB Gun Controller EGC-10GS, it can support both EB guns for optical thin films and EB guns for metallic thin films. 【Product Lineup】 ○HPS-600N ○HPS-1000N ○EGC-10GS For more details, please contact us or download the catalog.
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basic information
【Features】 ○ No cooling water required → No cooling water is needed due to the forced air cooling method. ○ High reliability → Feedback from accumulated know-how as a device manufacturer is incorporated into the design. ○ Simple operability → The use of an LCD touch panel on the operation panel has improved usability. ○ Sweep waveform variations → Various beam scan forms can be created on the operation screen. ○ High-speed arc interruption function → A circuit is configured to minimize the decrease in deposition rate through high-speed arc interruption. ○ Low-level arc control function (optional for optical applications) → Controls the minute arcs generated in optical applications, enabling stable deposition. ● For more details, please contact us or download the catalog.
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Delivery Time
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Applications/Examples of results
【Applications】 ○ Vacuum deposition for metal films ○ Vacuum deposition for optical films ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
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