This is an electron beam evaporation source for optical film deposition that reduces costs. [ULVAC]
The EGP-1G is an electron beam evaporation source for optical film deposition that keeps costs down by adopting a simple 180° beam deflection method. Furthermore, by employing a two-sided positioning structure, it has a model with high beam position reproducibility after maintenance. 【Specifications】 ○ Electron beam deflection angle: 180° ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H) excluding protrusions: 185mm×239mm×179mm ○ Weight: 11kg ○ Maximum output: 10kW For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Adoption of a two-surface positioning structure → All parts that need to be removed during maintenance use a two-surface positioning structure. ○ High maintainability → The structure allows for easy filament replacement and emitter removal. ○ High reliability → Feedback from accumulated cases as a device manufacturer is incorporated into the design. ○ Adoption of a new emitter structure → The number of parts has been reduced by 60% compared to conventional designs, making assembly easier. ○ Adoption of a 180° beam deflection method → Beam stability is improved by shortening the beam trajectory. ○ High-speed sweep characteristics → Equipped with high-speed sweeping and vertical incidence functions, making it ideal for the deposition of oxides and compounds. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Evaporation source for electron beam deposition ○ Evaporation source for ion plating ○ Evaporation source for deposition roll coater ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.