It is a clean and highly reliable vacuum transport robot and transport platform. 【ULVAC】
This is a clean and highly reliable vacuum transport robot and transport platform that incorporates the technology developed by ULVAC, a manufacturer of vacuum equipment. We offer a wide range of products compatible with various vacuum equipment. 【Product Lineup】 ○ High vacuum compatible robot ELEC-RZ (for φ200mm/300mm wafers) ○ High vacuum compatible robot COVOT (for φ200mm/300mm wafers) ○ High vacuum compatible robot COVOT-LC (for φ200mm/300mm wafers) ○ Medium vacuum compatible independent four-arm robot COVOT-6 (for φ300mm wafers) ○ Vacuum transport platform NCH series (for φ200mm/300mm wafers) For more details, please contact us or download the catalog.
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basic information
**Features** ○ Diverse arm configurations → Arms can be selected according to device specifications such as the number of hands, rotation radius, and stroke. ○ High-precision transport → Employs highly rigid arms and reliable actuators to enable stable transport. ○ High vacuum compatibility → Compatible with high vacuum up to 10^-6 Pa (ELEC-RZ/COVOT). ○ Vacuum transport platforms also available → Various vacuum transport platforms are available that combine robots with core chambers and load lock chambers. ● For more details, please contact us or download the catalog.
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Delivery Time
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Applications/Examples of results
【Usage】 ○ Automatic wafer transport for various semiconductor manufacturing equipment ○ Substrate transport for various vacuum experimental devices ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.