Cleaning machine "Organic EL Mask Cleaning Device"

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last updated：Feb 10, 2026

大川興産

Official site

An environmentally friendly cleaning machine that achieves low emissions and low running costs.

The OEL-Clean series, highly regarded for its cleaning power, allows for the precise control of organic materials deposited on metal masks through its use and the extensive know-how that accompanies it, achieving a quality that is indistinguishable from a new mask. It maximizes safety, security, environmental considerations, cleaning precision, cost-effectiveness, and productivity. The use of non-flammable solvent HFE for rinsing and drying ensures safety. The HFE solvent is also rejuvenated into new liquid through distillation and HC/HFE separation equipment, allowing for reuse. 【Features】 - Thin film masks are sensitive to thermal stress, and this is addressed by washing at room temperature to eliminate thermal stress. - With the incorporation of a distillation unit, the cleaning solution is rejuvenated into new liquid, and contaminants are condensed and discharged as a small amount of waste liquid, eliminating the need for traditional full liquid replacement. For more details, please contact us or download the catalog.

Related Link - https://www.ohkawa-kohsan.com/products/details.htm…

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basic information

【Features】 ○ The cleaning method is based on the unique "co-solvent method." ○ In the cleaning process, a hydrocarbon-based cleaning solvent (HC) is selected that can completely and quickly dissolve and remove organic materials adhered to the metal mask during the organic EL deposition process. ○ The metal mask after cleaning is rinsed and dried with a non-chlorinated organic solvent (HFE). ○ The hydrocarbon-based cleaning solvent (HC) used in the cleaning process distills and separates the dissolved organic materials using an integrated vacuum distillation system, and then returns to the cleaning process. ○ The metal masks removed from the cleaning process are sent to the rinsing and drying process. ○ The metal masks that have completed the rinsing process are sent to the vacuum drying process (low vacuum). ○ The entire process is carried out at room temperature, ensuring that there is no stress on the metal masks due to temperature. ○ The hydrocarbon-based cleaning solvent (HC) and non-chlorinated organic solvent (HFE) used in this cleaning device are all recycled through distillation and solvent recovery systems, significantly reducing running costs. ● For more details, please contact us or download the catalog.