High-reliability, long-life high-voltage power supply for ESC.
The ESC power supply is a DC power supply used for electrostatic adhesion of silicon wafers. By applying high voltage within the vacuum chamber, it generates electrostatic attraction between the silicon wafer and the ceramic plate. 【Features】 ■ Polarity reversal of HV output ■ Protection from surges and arcs generated during the process ■ Improved reliability through short-circuit and open-circuit protection circuits *For more details, please refer to the attached PDF and feel free to contact us directly at 047-369-3389.
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basic information
Bipolar ±750 V 6.5 mA output capability *For details, please refer to the attached PDF and feel free to contact us directly at 047-369-3389.
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Applications/Examples of results
It is widely used as a method to secure silicon wafers in the semiconductor manufacturing process (PVD, CVD, ETCH).
Company information
■ Repair and Upgrade We provide repair services for various power supplies, matching networks, phase shifters, and more. Based on our experience, knowledge, and track record, we not only repair the faulty components but also receive high praise for our proposals and improvements aimed at enhancing reliability, such as optimizing the parts used. For our repair and upgrade achievements and the main peripheral devices we support, please refer to the following link: http://www.pra.jp/repair-upgrade *For estimates or inquiries, please contact us directly at the phone number below or through our website link (contact form). 047-369-3389 http://www.pra.jp/contact
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