Industrial Electrical Equipment

P.R.A. 本社

EstablishmentJanuary 19, 2004
capital1000Ten thousand
number of employees30
addressChiba/Matsudo-shi/8-33-3 Narita
phone047-369-3389
last updated：
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P.R.A. Product Lineup

1～9 item / All 9 items

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ESC Power Supply-1 (PHV Series)

A power supply designed to be compatible with existing electrostatic chucks, equipped with polarity reversal and automatic discharge functions.

The "PHV Series ESC Power Supply" features polarity reversal and automatic discharge functions, improving the chuck release characteristics of wafers. It is designed to be compatible with existing electrostatic chucks, is compact and lightweight, and incorporates low stored energy and current limiting to protect the process from surges and arcs. It is suitable for both Johnson-Rahbek and Coulomb-type ESC applications. 【Features】 ■ Designed for compatibility with existing electrostatic chucks ■ Compact and lightweight ■ Low stored energy ■ Equipped with polarity reversal and automatic discharge functions ■ Improves wafer chuck release characteristics *For more details, please refer to the attached PDF or feel free to contact us directly at 047-369-3389.

  • power supply
  • power supply

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ESC Power Supply-2

High-reliability, long-life high-voltage power supply for ESC.

The ESC power supply is a DC power supply used for electrostatic adhesion of silicon wafers. By applying high voltage within the vacuum chamber, it generates electrostatic attraction between the silicon wafer and the ceramic plate. 【Features】 ■ Polarity reversal of HV output ■ Protection from surges and arcs generated during the process ■ Improved reliability through short-circuit and open-circuit protection circuits *For more details, please refer to the attached PDF and feel free to contact us directly at 047-369-3389.

  • power supply

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Repair-1

RF, DC power supply (AE, ENI, Comdel, etc.)

*For details, please refer to the attached PDF and feel free to contact us directly at our company. 047-369-3389

  • power supply
  • power supply

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Repair-2

Matching network (AMAT, AE, DAIHEN, etc.)

*For details, please refer to the attached PDF and feel free to contact us directly at our company. 047-369-3389

  • power supply
  • power supply

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Repair-3

RPS(MKS, AE)

*For details, please refer to the attached PDF and feel free to contact us directly at our company. 047-369-3389

  • power supply
  • power supply

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Repair-4

Robot (Brooks, LUDL)

*For details, please refer to the attached PDF and feel free to contact us directly at our company. 047-369-3389

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  • power supply

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Upgrade-1

Matching Network (AMAT, AE, etc.)

*For details, please refer to the attached PDF and feel free to contact us directly at our company. 047-369-3389

  • power supply
  • power supply

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Upgrade-2

DC power (AE, others)

*For details, please refer to the attached PDF and feel free to contact us directly at 047-369-3389.*

  • power supply
  • power supply

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Upgrade-3

ESC power supply (Lam Research, etc.)

*For details, please refer to the attached PDF and feel free to contact us directly at 047-369-3389.*

  • power supply
  • power supply

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