By directly controlling the temperature of the medication flow tube, we can reduce power consumption by 95% compared to conventional indirect temperature control methods!
Temperature management of the cleaning solution used in semiconductor manufacturing is a crucial factor that affects product quality and productivity. This device, utilizing a Peltier module, controls the temperature of the cleaning solution to ±0.05°C. It is a very compact module that directly controls the temperature of the flow path tube, allowing for a reduction in usage by 10-30% compared to traditional tanks that regulate the solution temperature. Furthermore, due to its simple structure with no moving parts, it operates without vibration or noise and requires almost no maintenance. Temperature control is managed with a separately sold dedicated controller.
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basic information
Product lineup - CLEANSTEAM 1100 Temperature range 5℃～45℃ - CLEANSTEAM 800C Temperature range 5℃～35℃ - CLEANSTEAM 550/H1500 Temperature range 5℃～90℃ - CLEANSTEAM H3000 Temperature range 40℃～90℃ Dedicated controller - Switch Back Power Supply and Controller
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Applications/Examples of results
Temperature control of the cleaning device's chemical solution and pure water.
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Company information
MS Equipment is a specialized trading company with approximately 50 years of experience in the chiller business, serving as the exclusive agent in Japan for NESLAB, a leading chiller manufacturer in the world (now Thermo Fisher Scientific). We have a proven track record of delivering over 20,000 chillers. Since 2014, we have started handling Peltier-type chillers from Solid State Cooling Systems in the United States, providing products that meet the needs of customers sensitive to environmental and energy issues. ISO 14001:2004: JQA-EM4217, ISO 9001:2000: JQA-QMA12892