Improved measurement accuracy! Equipped with an LED that allows for easy confirmation of the vacuum gauge's status at a glance. [ULVAC]
The G-TRAN series vacuum gauge multi-ion gauge ST2-1/ST2-2 achieves long life by maximizing the advantages of the triode type, even in harsh environments for vacuum gauges. ULVAC has developed and commercialized an ion vacuum gauge that can measure accurately for a longer time, even in severe conditions. The triode type metal ion vacuum gauge significantly reduces running costs and can also contribute to improving the yield of various processes. 【Features】 ○ Triode type metal ion vacuum gauge (patent pending) ○ Small, metal measuring element ○ Wideband measurement ○ Measuring elements with different measurement ranges can be connected ○ Accurate atmospheric pressure measurement For more details, please contact us or download the catalog.
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basic information
【Specifications】 ○ Model: ST2-1 Standard Type, ST2-2 Communication Type ○ Connectable Sensors → Multi-Ion Gauge Sensor x1 → Pirani Gauge SPU x1 (Optional) → Pressure Sensor Unit SAU x1 (Optional) ○ Measurement Pressure Range: 1×10⁻⁵ to 1×10⁺¹ Pa ○ Measurement Accuracy: 1×10⁻⁴ to 3 Pa ±10% ○ Repeatability Accuracy: 1×10⁻⁴ to 3 Pa ±2% ○ Sampling Time: 50 ms with 5-point moving average processing ○ Measurement Value Output: Output Voltage DC 0 to 10 V LOG output 0.75 V/1 digit ○ Update Time: 50 msec ○ Control Input Signal: FIL ON/OFF, FIL 1/2, DEGAS ON/OFF Operates with open collector input, negative logic ○ Control Output Signal: Sensor Error, Set Point 1/2/3 Emission Valid, Filament Power Monitoring Rating: 24 V max, 50 mA max, Saturation Voltage 1 V ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Confirmation of the achieved pressure of manufacturing equipment such as organic EL and touch panels, as well as for process management in various industrial vacuum devices like vacuum furnaces. ○ Measurement in atmospheres rich in hydrocarbons (oil-based). ○ Measurement in atmospheres where cutting oils or cleaning liquids remain during vacuum component processing. ○ For vacuum devices aiming to reduce the frequency of vacuum gauge replacements. ● For more details, please contact us or download the catalog.
Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
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