This is an electron beam evaporation source developed with a focus on improving maintainability for metal deposition. 【ULVAC】
The EGN series is a metal vapor deposition electron beam evaporation source developed with a focus on improving maintenance. The adoption of a flat-top structure and a 15mm hearth deck reduces the coating area on the electron beam evaporation source, achieving high maintenance efficiency. 【Specifications】 ○ Electron beam deflection angle: 270° ○ Number of crucibles: 6 ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H): 260mm×340mm×144mm ○ Weight: 28kg For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Adoption of flat top structure and 15mm hearth deck → Smaller deposition area for the electron beam evaporation source, making cleaning easy ○ Adoption of new emitter structure → Reduced the number of parts to 60% compared to conventional designs, facilitating assembly ○ Side water cooling mechanism for the crucible → By cooling the bottom and sides, it minimizes mixing from the crucible to the evaporated material, reducing contamination ○ Beam shape selection mechanism → Allows selection between ribbon-shaped beams optimal for metal deposition and spot beams optimal for oxides/compounds ○ High reliability → Feedback from accumulated case studies as a device manufacturer is incorporated into the design ○ Adoption of two-sided positioning structure → Improved beam position reproducibility after maintenance ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Evaporation source for electron beam deposition ○ Evaporation source for ion plating ○ Evaporation source for deposition roll coater ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
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