High throughput! Large capacity is possible with master-slave connections. [ULVAC]
The A2K series is an abnormal discharge prevention unit that applies a positive voltage pulse to a DC power supply in a reactive sputtering process to neutralize the charge on the target. By reducing abnormal discharges, it enables high power input. The A2K-20K and 40K can be operated in parallel with up to six units each. It is possible to synchronize the output pulses of multiple A2K units. It can be easily installed on existing equipment, achieving improved yield and throughput at a low cost. 【Features】 ○ High throughput ○ Reduced substrate damage ○ Suppressed substrate temperature ○ Simple connectivity ○ Adjustable reverse pulse frequency For more details, please contact us or download the catalog.
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basic information
【Specifications】 ○ Model: A2KH-25, A2KH-50, A2KH-20K, A2KH-40K ［Control Power Input］ ○ Input → A2KH-25/50: AC90–110V → A2KH-20/40K: AC100–240V ○ Frequency: Single-phase 50/60Hz ○ Power: 100VA, 120VA, 400VA, 400VA ○ Leakage Current: Below 1mA ［Input Specifications］ ○ Operating Voltage: -100 to -800V ○ Operating Current: 0–25A, 0–50A, 0–50A, 0–100A ○ Input Structure: Connector connection, terminal block or connector connection ［Output Specifications］ ○ Pulse Width: 5μs/10μs switchable by internal switch, 1–18μs with frequency limitation ○ Reverse Pulse Voltage: 10-20% of DC power output voltage (depends on load impedance) ○ Insulation Voltage: -1500Vdc ○ Parallel Operation Function: None, up to 6 units possible ○ Cooling Method: Forced air cooling ○ Compliance Standards: RoHS Directive ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Reactive sputtering equipment for FPD ○ Reactive sputtering equipment for industrial coating ○ Reactive sputtering equipment for color TFT ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
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