Significant reduction in power consumption! Peltier chiller 'ThermoRack1201'

Optimal for plasma etching in semiconductor manufacturing! Up to 93% reduction in power consumption! Prevents noise and vibration as well!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with quick temperature responsiveness and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving quality variations between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

Chiller