By directly controlling the temperature of the drug solution flow tube, we can reduce power consumption by 95% compared to conventional indirect temperature control methods!
Temperature management of the cleaning solution used in semiconductor manufacturing processes is a crucial factor that affects product quality and productivity. This device, which uses a Peltier module, controls the temperature of the cleaning solution to within ±0.05°C. It is a very compact module that directly controls the temperature of the flow path tube, allowing for a reduction in usage by 10-30% compared to traditional methods that use a tank to regulate the solution's temperature. Furthermore, due to its simple structure with no moving parts, it operates without vibration or noise and requires almost no maintenance. ● For more details, please contact us.
Inquire About This Product
basic information
Product Lineup - CLEANSTEAM 1100 Temperature Range 5℃～45℃ - CLEANSTEAM 800C Temperature Range 5℃～35℃ - CLEANSTEAM 550/H1500 Temperature Range 5℃～90℃ - CLEANSTEAM H3000 Temperature Range 40℃～90℃ Dedicated Controller - Switch Back Power Supply and Controller
Price range
Delivery Time
Applications/Examples of results
Temperature control of the cleaning device's chemical solution and pure water.
catalog（1）
Download All Catalogs
Company information
MS Equipment is a specialized trading company with approximately 50 years of experience in the chiller business, serving as the exclusive agent in Japan for NESLAB, a leading chiller manufacturer in the world (now Thermo Fisher Scientific). We have a proven track record of delivering over 20,000 chillers. Since 2014, we have started handling Peltier-type chillers from Solid State Cooling Systems in the United States, providing products that meet the needs of customers sensitive to environmental and energy issues. ISO 14001:2004: JQA-EM4217, ISO 9001:2000: JQA-QMA12892