You can measure the 300mm wafer as it is.
TOF-SIMS has the characteristics of simultaneously evaluating organic and inorganic materials, being capable of analyzing small areas with high sensitivity at the very surface, and allowing evaluation while still in the form of 300mm wafers, making it effective for residue investigations during cleaning processes. We will introduce an analysis case of the removal effect of organic contamination on Si surfaces. TOF-SIMS analysis was conducted on samples where amine-based organic materials were confirmed to be in extremely small quantities by XPS. Even in small areas, it is possible to measure components in such extremely small amounts.
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basic information
For detailed data, please refer to the catalog.
Price information
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Delivery Time
Applications/Examples of results
Analysis of LSI, memory, and electronic components.
catalog（1）
Download All Catalogs![[Analysis Case] Evaluation of Cleaning Effect of Organic Ingredients_C0035](https://image.mono.ipros.com/public/catalog/image/01/985/334718/IPROS43850937915598611683.jpeg?w=120&h=170)
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!