Atomic-level resolution EDX analysis using Cs-corrected STEM.
By using a Cs-corrected TEM device that compensates for spherical aberration, it is possible to observe the cross-sectional structure of devices with high resolution. This case presents data from high-resolution (HR)-STEM observation and EDX elemental distribution analysis of the light-absorbing layer of CIGS thin-film solar cells. In CIGS, which has a polycrystalline structure composed of four elements, atomic resolution EDX analysis was performed, visually revealing the distribution of atoms.
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Analysis of solar cells.
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