The measurement of amines is possible using the IC (Ion Chromatography) method.
Tetramethylammonium hydroxide (TMAH) is used as a developing solution and etching solution in semiconductors. When measuring the concentration of TMAH solution used in Si etching solutions, the large amount of dissolved Si can become an impurity and affect the measurement results. However, evaluation using the IC (ion chromatography) method allows for quantitative analysis of TMAH concentration without being influenced by Si.
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Analysis of solar cells, LSI, memory, manufacturing equipment, components, and the environment.
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Download All Catalogs![[Analysis Case] TMAH Analysis Case in Si-containing Solution by IC Method_C0359](https://image.mono.ipros.com/public/catalog/image/01/05a/335148/IPROS3281081753427469692.jpg?w=120&h=170)
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!