CVD-SiC (Chemical Vapor Deposition) "Film Single Component Manufacturing Technology"
Numerous achievements in a harsh environment! Versatile membrane manufacturing technology that can adapt widely.
We provide products composed solely of dense SiC films by applying coating technology. Our solutions can be widely adapted, from flat plates to complex shapes. We have numerous achievements in harsh environments, including ultra-high temperatures and plasma, primarily in semiconductor manufacturing equipment. 【Manufacturing Process (Example)】 1. Machining graphite substrate into a disc shape 2. CVD-SiC coating applied to the entire surface 3. Exposing the substrate through outer circumference processing 4. Removing the substrate in a high-temperature oxidation atmosphere 5. Resulting in two single-layer film discs 6. Grinding/polishing, chamfering, cleaning, and inspection For more details, please contact us or download the catalog.
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basic information
【Technology and Products】 ○SiC Technology ○Coating Technology ○Thin Film Manufacturing Technology ○Various Physical Properties of SiC ○Solutions ●For more details, please contact us or download the catalog.
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Company information
FerroTec Holdings Co., Ltd. is actively engaged in three business segments based on product applications and market fields: "Equipment-related business," "Solar cell-related business," and "Electronic device business." In the new energy and electronics industries, we propose high-quality products and services while providing cost-competitive products and services. Additionally, we prioritize activities that consider the global environment as one of our key management issues, progressively adapting to the latest environmental regulatory requirements, developing materials and products that can be utilized in the new energy industry, and contributing to the resolution of global environmental issues. FerroTec Holdings Co., Ltd. aims to contribute to society through manufacturing that leverages core technologies and to remain a company where stakeholders, including customers, shareholders, employees, business partners, and the local community, can enjoy growth.