Significantly improve vacuum levels when used in combination with a turbo pump! Vacuum evacuation time can also be greatly reduced!!
The MicroStar manufactured by RICOR is a vacuum auxiliary pump using the Stirling cooler method. When used in conjunction with a turbo pump, it significantly improves vacuum levels and greatly reduces evacuation time. Unlike GM-type cryopumps, it does not require a separate large helium compressor or helium lines, making it compact and low power consumption. It is ideal as a vacuum auxiliary pump for load lock chambers, transfer chambers, process chambers, and vacuum deposition equipment in semiconductor processing systems.
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basic information
Twin piston linear Stirling cooler Water vapor pump - Speed: 7,000 L/S (at shroud ISO250)
Price range
Delivery Time
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Applications/Examples of results
Load lock chamber of semiconductor process equipment, transfer chamber and process chamber, vacuum auxiliary pump of vacuum deposition equipment.
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