Compact type rotation introducer! For raising and lowering the substrate stage and transporting wafers!
The "Compact Rotary Feedthrough (IRC)" is a unit that incorporates a high-performance welded bellows, designed to isolate high vacuum and transmit rotational motion. Since it uses metal welded bellows for vacuum and atmospheric isolation, it can be used in ultra-high vacuum areas. In addition to this compact rotary feedthrough, which has a rotational positioning accuracy (without load) of 2° ± 0.5°, we also offer a high-precision rotary feedthrough with an accuracy of 0.5°. 【Features】 ■ Incorporates Irie Koken's welded bellows and standardizes connection flanges CF34 and CF70 ■ By using welded bellows for the drive unit seal, it can be used in high vacuum areas ■ Extremely simple design focused on functionality, making it compact and lightweight ■ Equipped with a rotation locking mechanism ■ Aperture can be set arbitrarily *For more details, please refer to the catalog or feel free to contact us.
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【Lineup】 ■IRC-34 ■IRC-70 *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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Irie Koken of Vacuum Bellows "The master of expansion and contraction at a higher level of airtightness"