入江工研 Product Lineup

NEG (Non-Evaporable Getter) is a vacuum pump that utilizes getter action to evacuate and generate ultra-high vacuum. Unlike getter pumps that obtain vacuum through heating and sublimation, it adsorbs gas molecules such as hydrogen onto the surface and inside of a film formed on the inner side of vacuum components by cooling after heating. It is generally used in combination with turbo molecular pumps and others. NEG (Non-Evaporable Getter) is the action of adsorbing gas molecules onto a chemically active solid surface through getter action. It adsorbs gases such as hydrogen (H2) and carbon monoxide (CO) that are continuously released from the inner surface of vacuum vessels after baking, maintaining ultra-high vacuum. The latest compactly designed NEG has been optimized for both performance and cost while enhancing functionality, allowing customers to relatively easily create ultra-high vacuum environments for their applications. For example, it can be applied to containers, equipment, and devices (such as analytical instruments and sample storage containers) that require ultra-high vacuum environments. We have developed 'NEGLAZE' utilizing this NEG technology.

• Vacuum pump
• Vacuum Equipment

We manufacture flexible tubes made of stainless steel. ------------------------------------------------------------------------------------------ A flexible tube is a relatively small-diameter bellows used for piping in devices that can be bent freely. 【Features】 - It can be bent freely, making it easy to connect piping. - The length of the tube can be easily set. - Our flexible tubes come standard with connections for vacuum piping.

• Pipe Fittings

At Irie Koken, we handle "Specially Shaped Bellows." We offer a lineup that includes the "Rectangular Bellows Series," which is based on square and rectangular openings, the "Elliptical Bellows Series," which is based on rounded rectangular openings, and the "Custom Shaped Bellows Series," which is manufactured according to customer specifications. We propose products that meet various needs. 【Features】 ■ Rectangular Bellows Series - Designed to absorb installation errors at the connection points between chambers and between chambers and gate valves. - Available in two types: folded bellows and welded bellows. ■ Elliptical Bellows Series - Products that improve displacement performance by rounding the corners, which are difficult to achieve with rectangular bellows. - Available in two types: molded bellows and welded bellows. ■ Custom Shaped Bellows Series - Products manufactured in appropriate opening shapes to fit available space when round, rectangular, or elliptical bellows cannot be accommodated due to equipment or piping design constraints. *For more details, please refer to the PDF document or feel free to contact us.

• Pipe Fittings

The "LFB/SFB" is a high-performance molded bellows handled by Irie Koken. The "LFB" is a royal molded bellows that achieves a high lifespan comparable to welded bellows (1 million cycles). It has excellent corrosion resistance and prevents stress corrosion cracking even against Cl2 and HBr gases. It outperforms SUS316L in terms of room temperature tensile strength and 0.2% yield strength at 650°. Additionally, the "SFB" is a super molded bellows that can be designed to be more than 50% more compact than conventional molded bellows. 【Features】 ■ Achieves a high lifespan comparable to welded bellows (1 million cycles) ■ Spring constant is less than 1/2 of conventional molded bellows ■ Can be designed to be more than 50% more compact than conventional molded bellows *For more details, please refer to the PDF materials or feel free to contact us.

• Pipe Fittings

"Formed bellows" have a longer historical background compared to welded bellows, and various manufacturing methods have been devised. However, the methods that are generally widely adopted are the mechanically formed roll forming method and the hydraulic bulging method. Our company manufactures using a unique hydraulic forming method. This allows for the prevention of stress variation and ensures uniform quality in mass production. [Features] - Higher precision compared to the roll forming method - Prevention of stress variation - Uniform quality in mass production - Cost-effective *For more details, please refer to the PDF document or feel free to contact us.

• Pipe Fittings

The "Magnetic Coupling Linear Rotary Introducer (MFL)" is an introduction mechanism that uses a magnetic coupling method with powerful permanent magnets. Since samarium-cobalt magnets are used both inside and outside the vacuum, it allows for high torque transmission and has a design with minimal lost motion. In addition to the linear rotary introducer, we also offer rotary introducers, so you can choose according to your application. Moreover, it is compatible with motor drive. 【Features】 ■ The driven magnetic part inside the vacuum is sealed with stainless steel thin plates, reducing gas release. ■ Baking can be done with the magnets attached. ■ By replacing the bearings, it can be used semi-permanently. ■ An optional rotation prevention mechanism is also available. *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment

Our company manufactures chambers that can create special environments ranging from ultra-high vacuum to atmospheric pressure, plasma environments, and rarefied active gas environments.

• CVD Equipment
• Sputtering Equipment
• Other semiconductor manufacturing equipment

Please use it for deposition protection and light/beam blocking for the viewing port. It is a shutter designed for vacuum equipment, available in two types: manual and automatic (air-driven).

• CVD Equipment
• Sputtering Equipment
• Other semiconductor manufacturing equipment

Please use this for adjusting the shaft offset and angle when installing the magnetic coupling linear rotary introducer (MFL). It is optimal for error adjustment when attaching equipment to the vacuum chamber.

• Sputtering Equipment
• Other semiconductor manufacturing equipment

In response to the increasing size of glass substrates in FPD manufacturing equipment, IKC has developed a large gate valve through the technology cultivated in semiconductor manufacturing equipment and vacuum devices, along with its unique technology development. We have created a series of valves that correspond to various substrate sizes for FPD manufacturing equipment, which we would like to introduce. 【Product Lineup】 ■ KOSLARZE-II: Composed of a lifting cylinder and a cam ■ NEW KOSLARZE: Composed of a lifting cylinder and a sealing cylinder ■ LINK: Composed of a lifting cylinder and a link mechanism incorporated into the valve plate ■ SWELL GARIVA: Composed of a lifting cylinder and a sealing cylinder mounted inside the valve plate *For more details, please refer to the PDF materials or feel free to contact us.

• valve

This is an introduction mechanism using a magnetic coupling method with a powerful permanent magnet. We offer two types: rotational introduction and linear rotational introduction, and it is also compatible with motor drive.

• Vacuum Equipment

The IKC linear (straight) introducer is a linear (straight) introducer that incorporates a highly reliable welded bellows, enabling a long stroke. Additionally, we offer both manual and automatic types for each size.

• Vacuum Equipment

This is a welded bellows with a conflat flange. We manufacture bellows that are longer-lasting and cleaner, and we will deliver them with a quick response and quick delivery system.

• Vacuum Equipment

This is a valve compatible with the 10th generation. It has stable performance and has earned the trust of our customers.

• valve

We will manufacture bellows that are longer-lasting and cleaner, and deliver them with a quick response and quick delivery system.

• Vacuum Equipment

"Compact Coslars II" is a high-quality rectangular gate valve that can also be used in the manufacturing equipment for next-generation LSI and LCD. Thanks to IKC's unique technology, it maintains a highly clean state within the equipment without sliding, has a long seal retention time, and exhibits stable sealing performance against back pressure seals. Additionally, it is designed with easy maintenance in mind, reflecting customer requests. 【Features】 ■ Particle-free ■ High level of sealing performance ■ Easy maintenance ■ Long lifespan and high-level quality *For more details, please refer to the related link page or feel free to contact us.

• valve

This bellows-type rotary feedthrough comes in two types: a high-precision rotary feedthrough and a compact rotary feedthrough. It is a unit designed to transmit rotary motion from the atmospheric side to the vacuum side. A metal welded bellows is used to isolate the vacuum from the atmosphere, allowing it to be used in ultra-high vacuum environments. We offer two types: a compact rotary feedthrough with a positioning accuracy of 2° ± 0.5° (under no load) and a high-precision rotary feedthrough with an accuracy of 0.5°.

• Vacuum Equipment