Oxygen-free Pd/Ti deposition ICF zero-length NEG pump
NEG (Non-Evaporable Getter) is a vacuum pump that utilizes getter action to evacuate and generate ultra-high vacuum. Unlike getter pumps that obtain vacuum through heating and sublimation, it adsorbs gas molecules such as hydrogen onto the surface and inside of a film formed on the inner side of vacuum components by cooling after heating. It is generally used in combination with turbo molecular pumps and others. NEG (Non-Evaporable Getter) is the action of adsorbing gas molecules onto a chemically active solid surface through getter action. It adsorbs gases such as hydrogen (H2) and carbon monoxide (CO) that are continuously released from the inner surface of vacuum vessels after baking, maintaining ultra-high vacuum. The latest compactly designed NEG has been optimized for both performance and cost while enhancing functionality, allowing customers to relatively easily create ultra-high vacuum environments for their applications. For example, it can be applied to containers, equipment, and devices (such as analytical instruments and sample storage containers) that require ultra-high vacuum environments. We have developed 'NEGLAZE' utilizing this NEG technology.
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■Main Features - High-speed exhaust (H2: 2,200L/s) Maintains exhaust performance even after repeated atmospheric introduction, vacuum exhaust, and baking. *The above values are for reference only and are not guaranteed. - Zero length (height 0mm) No power required after baking. - Lightweight/Compact/Can be installed on ICF port Capable of exhaust without oil. - No noise/No particles Does not involve evaporation or sputtering. ■Main Specifications - Standard/Size ICF 203 (φ203×t22mm) - Weight 2.85kg (main unit only) - Exhaustable gases Hydrogen / Carbon monoxide - Number of reactivation cycles More than 10 times ■For more details, visit https://www.ikc.co.jp/products/vacuum_pump/vacuum_pump_detail.html *This product is licensed under Patent No. 6916537 "Non-evaporative getter coating parts, containers, manufacturing methods, and devices" held by the High Energy Accelerator Research Organization, a joint-use institution of universities.
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Irie Koken of Vacuum Bellows "The master of expansion and contraction at a higher level of airtightness"
