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  3. Measurement and Analysis
  4. Inspection Equipment and Devices
  5. Other inspection equipment and devices
  6. Slim-type 100nm resolution stage (50mm)

Slim-type 100nm resolution stage (50mm)

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FS-1050X(S)

last updated:Jun 03, 2019

シグマ光機
シグマ光機
  • Official site

Built-in encoder! High-resolution positioning stage

It is equipped with an in-house developed optical linear scale encoder, allowing it to operate with a resolution of 100 nm or 50 nm when controlled by the controller. This is a custom example of a slim model in the direction of travel. Benefits of being slim: - Space-saving with a long stroke - Securing space on the reference plane - Miniaturization of inspection equipment

    Other inspection equipment and devicesElectron microscope
FS-1050X(S).jpg

Slim-type 100nm resolution stage (50mm)

FS-1050X(S).jpg
FS-1050X(S).jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

Model: FS-1050X(S) Stroke: 50 mm When using dedicated controller Resolution: 100 nm or 50 nm (built-in scale reading) Repeatability: ±200 nm or ±100 nm (built-in scale reading) Maximum moving speed: 10 mm/s Table size: 80×60 mm Compatible controllers: FC-111 or FC-411

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Applications/Examples of results

Fields requiring precise positioning Jigs for optical research Inspection equipment for precision parts

CAD data(2)

Model number overview File
FS-1050X(S) 50mm stroke, 100nm or 50nm resolution (built-in scale reading) operation
  • 2D dxf ( 891KB)
FS-1050X(S) 50mm stroke, 100nm or 50nm resolution (built-in scale reading) operation
  • 3D bmp ( 3MB)

Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

Product/Service List (78)

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