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  6. 1nm Feedback Stage FS-1020UPX / XY

1nm Feedback Stage FS-1020UPX / XY

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FS-1020UPX / FS-1020UPXY

last updated:Jun 03, 2019

シグマ光機
シグマ光機
  • Official site

"Precision positioning device" maintains high resolution of 1nm while increasing movement speed!

It is equipped with an optical linear encoder, allowing positioning with a resolution of '1nm' against the reading value of the built-in scale. The stroke is '20mm' long, enabling both transport and precise positioning with a single unit. It is used in research fields that handle wavelengths on the nanometer order.

    Other FA equipment
fs1020upx_images.jpg

1nm Feedback Stage FS-1020UPX / XY

fs1020upx_images.jpg
fs1020upx_images.jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

Minimum resolution: 1nm Maximum movement speed: 5mm/sec (when using FC-911) Stroke: 20mm Table size: □60mm Built-in scale: Quartz glass Compatible controller: FC-911

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Applications/Examples of results

The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.

catalog(4)

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Vacuum-Compatible 1nm Feedback Stage System Catalog

Vacuum-Compatible 1nm Feedback Stage System Catalog

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1nm Feedback Stage System Catalog

1nm Feedback Stage System Catalog

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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

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Precision Positioning Stage 'Q&A You Should Know When Selecting'

Precision Positioning Stage 'Q&A You Should Know When Selecting'

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CAD data(1)

Model number overview File
DWG-DXF_FS-1020UPX This is a complete set of drawings for the 1nm resolution stage FS-1020UPX. We have 2D formats available in "DXF" and "DWG".
  • 2D zip ( 147KB)

Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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