Built-in encoder, 10nm resolution, high positioning repeatability, and excellent position retention after positioning stage!
An optical linear encoder is built into the center of the stage to reduce position detection errors, and by feeding back position information to the controller, it achieves high resolution, high positioning repeatability, and position holding capability after positioning. The stroke is '100mm' with a resolution of '10nm' (*1). Due to the long operating range, both movement and positioning can be performed with this single stage. (*1) In combination with the feedback stage controller FC-511.
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basic information
Minimum resolution: 10nm Maximum moving speed: 10mm/sec (when using FC-511) Stroke: 100mm Compatible controller: FC-511 ■For more details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology, among others. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
