Optical Thin Film Formation Device Genesis-AR Series
http://www.showashinku.co.jp/product/new_Genesis.html
Ideal for film formation on high curvature lenses and ball lenses, which is difficult with sputtering.
In the optical thin film process, by using the ALD (Atomic Layer Deposition) method, which is different from the commonly used deposition and sputtering techniques, it has become possible to form high-quality thin films with excellent conformity on substrates such as ball lenses and high-curvature lenses, which have been considered difficult until now. 【Overview】 ○ Up to 50 φ10 inch substrates can be processed at once (25 substrates × 2 axes) * This varies depending on the substrate shape and conditions. ○ Equipped with a substrate rotation mechanism.
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basic information
【Features】 ○ Capable of forming a film well on high curvature lenses ○ Film thickness control is managed only through deposition cycle management ○ Compatible with substrates requiring low-temperature deposition, such as olefin-based resins ○ Excellent film thickness distribution within and between batches ○ Supports energy-saving and space-saving solutions ○ Possible to expand for automation
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Applications/Examples of results
【Main Uses and Application Examples】 ○ Formation of anti-reflective coatings on ball lenses and gull-wing lenses ○ Formation of optical thin films on high-curvature lenses and resin lenses ○ Uniform film formation on substrates with complex shapes
Company information
Showa Vacuum Co., Ltd. manufactures and sells vacuum technology application devices (vacuum equipment) such as vacuum deposition devices and sputtering devices, primarily focused on equipment that forms thin films on specific substrates in a vacuum.
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