Positioning with 100nm resolution! Controller for long stages.
It can be used as a positioning device with 100nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, ensuring high resolution and excellent reproducibility. The FC-114 is compatible with signal inputs from slow-down sensors and ORG sensors. This controller is used when employing a long-scale submicron feedback stage. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
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basic information
Model: FC-114 Compatible Stages: FS-3200X, FS-3300X, FS-3400X, FS-2200X, FS-2300X, FS-2400X, and stages similar to FC-111 Number of Control Axes: 2 Minimum Command Unit: 100nm In-Position Range: ±100nm (±300nm, ±700nm selectable) Maximum Operating Speed Setting: 100mm/sec (dependent on the performance of the connected stage) Control Interface: Emergency stop input, GP-IB, USB, Ethernet, General I/O Teaching Function: 200 lines × 5 channels (1 command per line) Slowdown Sensor: Supported ORG Sensor: Supported Power Supply: AC100V–240V
Price range
P3
Delivery Time
Applications/Examples of results
Microscope stage applications Optical system alignment and delay adjustment applications Connection applications between microdevices Positioning applications for testing machines and evaluation devices Positioning applications in advanced research
Line up(2)
Model number | overview |
---|---|
FC-111 | Successor to FC-101 |
FC-114 | Model that supports inputs for slowdown sensor and ORG sensor on FC-111 |
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