Positioning with sub-micron resolution! Excellent reproducibility with built-in encoder, stage with a stroke of 20 to 400 mm.
■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with sub-micron resolution, and the optical linear encoder integrated into the stage reads the position and performs feedback control, resulting in high resolution and excellent reproducibility. The stage controller operates at a resolution of either 100nm (0.1μm) or 50nm (0.05μm). ■Long Stroke It can move up to a maximum of 400mm. This enables precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device. ■Movable Type In addition to linear motion, we also offer lift types and micro-rotation options. For more details, please download the catalog or contact us.
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basic information
■Stage Minimum resolution: 100nm or 50nm (relative to the reading value of the built-in scale) Stroke: 20mm to 400mm Maximum movement speed: 20mm/sec (varies depending on stroke and movable type) ■Controller Number of control axes: 2 Minimum command unit: 100nm or 50nm Maximum operating speed setting: 100mm/sec (the maximum movement speed of the stage takes priority) Control interface: Jog controller, emergency stop input, GP-IB, USB, Ethernet, general-purpose I/O
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Applications/Examples of results
Various fields requiring fine positioning. Inspection devices and exposure devices. Applications in laser processing equipment. Adjustment of optical systems. Stages for microscopes requiring high reproducibility in the bio-related field, etc.
Line up（15）
| Model number | overview |
|---|---|
| FS-1020X | 100nm or 50nm resolution (internal scale reading), stage with 20mm stroke |
| FS-1040X | 100nm or 50nm resolution (internal scale reading), stage with 40mm stroke |
| FS-1050X | 100nm or 50nm resolution (internal scale reading), stage with 50mm stroke |
| FS-1100X | 100nm or 50nm resolution (internal scale reading), stage with 100mm stroke |
| FS-3150X | 100nm or 50nm resolution (internal scale reading), stage with 150mm stroke |
| FS-1005Z | 100nm or 50nm resolution (internal scale reading), lift type stage with 5mm stroke |
| FS-1010Z | 100nm or 50nm resolution (internal scale reading), lift type stage with 10mm stroke |
| FC-411 | Controller for sub-micron resolution stage controlled at 50nm resolution |
| FC-111 | Controller for sub-micron resolution stage controlled at 100nm resolution |
| FS-3200X | 100nm or 50nm resolution (internal scale reading), stage with 200mm stroke |
| FC-414 | Controller for sub-micron resolution stage controlled at 50nm resolution, supports inputs for slowdown sensor and origin sensor |
| FS-1120θ | 0.0001° or 0.00005° resolution (internal scale reading), rotation stage with ±4° stroke |
| FC-114 | Controller for sub-micron resolution stage controlled at 100nm resolution, supports inputs for slowdown sensor and origin sensor |
| FS-3300X | 100nm or 50nm resolution (internal scale reading), stage with 300mm stroke |
| FS-3400X | 100nm or 50nm resolution (internal scale reading), stage with 400mm stroke |
catalog（5）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
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