For positioning applications within a vacuum chamber, positioning with sub-micron resolution, maximum movement range of 100mm.
A precision positioning device (feedback stage system) has achieved reproducibility with sub-micron resolution (0.1μm or 0.05μm) using an optical linear encoder built into the stage. It can be used within a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is widely used due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing issues with positioning, please feel free to contact us. For more details, please download the catalog or contact us.
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basic information
■Stage Minimum resolution: 100nm or 50nm (relative to the reading value of the built-in scale) Stroke: 20mm to 100mm Maximum movement speed: 2mm/sec Compatible vacuum level: 10^-4 Pa ■Controller Number of control axes: 2 Minimum command unit: 100nm or 50nm Maximum operating speed setting: 100mm/sec (the maximum movement speed of the stage takes priority) Control interface: Jog controller, emergency stop input, GP-IB, USB, Ethernet, general I/O
Price range
Delivery Time
Applications/Examples of results
Various fields requiring precise positioning. Research fields utilizing X-rays. Semiconductor field.
Line up（9）
| Model number | overview |
|---|---|
| FS-1050X(V) | 100nm or 50nm resolution (internal scale reading value), vacuum-compatible stage with a 50mm stroke |
| FS-1040X(V) | 100nm or 50nm resolution (internal scale reading value), vacuum-compatible stage with a 40mm stroke |
| FS-1020X(V) | 100nm or 50nm resolution (internal scale reading value), vacuum-compatible stage with a 20mm stroke |
| FC-411 | Controller for sub-micron resolution stage controlled at 50nm resolution |
| FC-111 | Stage controlling sub-micron resolution stage at 100nm resolution |
| FS-1100X(V) | 100nm or 50nm resolution (internal scale reading value), vacuum-compatible stage with a 100mm stroke |
| FS-1005Z(V) | 100nm or 50nm resolution (internal scale reading value), vacuum-compatible stage with a 5mm stroke that performs vertical motion |
| FS-1010Z(V) | 100nm or 50nm resolution (internal scale reading value), vacuum-compatible stage with a 10mm stroke that performs vertical motion |
| FS-1120θ(V) | 0.0001° or 0.00005 resolution (internal scale reading value), vacuum-compatible stage with micro-rotation motion of ±4° stroke |
catalog（3）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
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