For positioning applications within a vacuum chamber, built-in linear encoder enables positioning with a resolution of 5nm and a maximum movement range of 50mm.
An ultra-high-resolution positioning device (feedback stage system) has achieved a resolution of 5nm and a reproducibility of ±10nm for optical linear encoders. It can be used in a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The available strokes are "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.
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basic information
■Stage Minimum resolution: 5nm (relative to the reading value of the built-in scale) Stroke: 20mm to 50mm Maximum movement speed: 2mm/sec Compatible vacuum level: 10^-4 Pa ■Controller Number of control axes: 2 Minimum command unit: 5nm Maximum operating speed setting: 30mm/sec (the maximum movement speed of the stage takes priority) Control interface: Jog controller, emergency stop input, GP-IB, USB, Ethernet, general-purpose I/O
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Applications/Examples of results
Various fields requiring fine positioning. Research fields utilizing X-rays. Semiconductor field.
Line up（4）
| Model number | overview |
|---|---|
| FS-1050SPX(V) | 5nm resolution (internal scale reading value), vacuum-compatible stage with 50mm stroke |
| FS-1040SPX(V) | 5nm resolution (internal scale reading value), vacuum-compatible stage with 40mm stroke |
| FS-1020SPX(V) | 5nm resolution (internal scale reading value), vacuum-compatible stage with 20mm stroke |
| FC-611 | Controller for 5nm resolution stage |
catalog（3）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.