Air Stage LBT Series
Air Stage LBT Series Compatible with Class 1 clean rooms Stroke range from 50 mm to 500 mm Encoders can be selected from 1 µm to 0.05 µm depending on the application Straightness and flatness are 0.5 µm/300 mm Pitching and yawing are ±2 arc seconds Delivery is possible in a fully assembled state from a condition without coils, magnets, or encoders There is a wealth of overseas delivery records for semiconductor inspection equipment, and this is the first introduction in Japan. Standardization enables low costs and short delivery times. There is also a lineup of XY stages.
Inquire About This Product
basic information
Stroke is 50mm to 500mm. The encoder can be selected from 1um to 0.05um depending on the application. Straightness and flatness are 0.5um/300mm. Pitching and yawing are ±2 arc seconds.
Price range
P3
Delivery Time
※The delivery time may vary depending on the quantity, so please feel free to contact us.
Applications/Examples of results
Image inspection equipment for semiconductor manufacturing devices
Detailed information
-
Class 1 Clean Room Compatible Stroke: 50 to 500 mm Delivery is possible in a fully assembled state with all components including coil, magnet, and encoder.
catalog（1）
Download All Catalogs
Company information
Our company is engaged in the product development of electric actuators such as linear motors, single-axis robots, and tabletop robots. In response to customer requests, we aim to shorten the cycle times of various automated production processes and reduce issues related to machine failures. This effort is directed towards improving the performance of our products. We also accommodate custom and OEM requests, so please feel free to contact us if you have any inquiries.
![[For Semiconductor Manufacturing] Z Direction / Chip/Tilt Stage Operation A-523](https://image.mono.ipros.com/public/product/image/311014/IPROS16782808659001168872.jpeg?w=280&h=280)
![[For efficient water drainage] 100% water-draining air nozzle](https://image.mono.ipros.com/public/product/image/00f/2001469742/IPROS9319730289540870960.png?w=280&h=280)
