Zero metal ion elution. High cleanliness connectors that reduce contamination risk in semiconductor chemical solution lines.
In the semiconductor manufacturing chemical supply process, extremely high purity is required for solutions such as wafer cleaning liquids and substrate coatings. The leaching of fine metal ions and contamination are significant issues that directly affect product yield. Therefore, a piping connection environment that thoroughly eliminates contamination risks at the liquid contact area is essential. Our ALL-PTFE connectors are composed entirely of PTFE at the liquid contact area, completely isolating the sliding parts during valve opening and closing from the liquid contact area, thereby supporting the supply of high-purity chemicals. 【Usage Scenarios】 - Supply lines for wafer cleaning liquids in semiconductor manufacturing - High-purity chemical lines for substrate coatings and other applications - Chemical supply equipment requiring automatic connection and disconnection of piping 【Benefits of Implementation】 - Maintenance of chemical purity with zero metal ion leaching - Prevention of fluid retention through simplified internal structure - Increased efficiency and reduced labor through automation of connection and disconnection
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【Features】 - All PTFE structure in the fluid contact area suppresses metal ion leaching - Integrated molding of the inner valve blocks the sliding parts from the fluid contact area during opening and closing - High cleanliness design eliminates fluid retention areas - Unique fixation method prevents fluid from bypassing the sealing components - Design focused on miniaturization and lightweight construction 【Our Strengths】 Nabtesco Service specializes in the design and manufacturing of auto connectors and automatic switching devices for piping, based on the technology cultivated in the automotive and industrial machinery sectors. We provide optimal solutions tailored to our customers' equipment specifications quickly through our fully customized offerings.
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■Specifications Drive Method: Normally Closed Pneumatic Drive Contact Parts Material: PTFE *O-ring material can be selected as desired Applicable Fluids: Various process fluids / Inert gases Applicable Fluid Temperature: 0 to 100℃ (no freezing) Maximum Cleaning Temperature: 143℃ (steam / hot water at 0.5MPa or less) Operating Pressure: Normal 0.6MPa (body pressure resistance 1.0MPa) Minimum Passage Cross-Sectional Area: At least the cross-sectional area of the connecting piping Durability of Internal Valve Opening and Closing: 20,000 cycles (passed internal durability test of 100,000 cycles) (Continuous operation durability count at clean water to 150℃ steam, 0.2 to 0.5MPa) Operating Air Pressure: 0.4MPa
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Nabtesco Service Co., Ltd. was established in February 1971 as a 100% subsidiary of Japan Air Brake Co., Ltd. (later Nabco Co., Ltd., now Nabtesco Corporation) with the aim of providing sales services for air brake parts for commercial vehicles. Today, it operates in a wide range of fields, from automobiles, railways, and ships to construction machinery, industrial machinery, and even environmental equipment, engaging in the design, manufacturing, sales, maintenance, and repair of various products, including pneumatic equipment, hydraulic equipment, and electronic devices. The core of Nabtesco Service's business is the design, development, manufacturing, maintenance, and servicing of key parts that support the safety and operation of industrial society, including brakes for automobiles and railway vehicles, control valves for construction machinery, and auto connectors, auto couplers, and couplers used in factory production lines. Its mission is to provide high-quality services quickly and reliably. Based on the technology and know-how cultivated over the years, Nabtesco Service aims to establish a system that delivers products in the shortest possible time and a nationwide service network, striving to provide high-quality services swiftly and reliably while supporting societal safety and contributing to industrial development.
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