For positioning applications within a vacuum chamber, it features built-in linear encoders for positioning with a resolution of 10nm and a maximum movement range of 100mm.
A precision positioning device (feedback stage system) that achieves a resolution of 10nm and a reproducibility of ±20nm with an integrated optical linear encoder. It can be used in a vacuum chamber with a vacuum level of up to 10^-4 Pa. Compared to positioning devices that use piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.
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basic information
■Stage Minimum resolution: 10nm (relative to the reading value of the built-in scale) Stroke: 20mm to 100mm Maximum moving speed: 2mm/sec Compatible vacuum level: 10^-4 Pa ■Controller Number of control axes: 2 Minimum command unit: 10nm Maximum operating speed setting: 50mm/sec (the maximum moving speed of the stage takes priority) Control interface: Jog controller, emergency stop input, GP-IB, USB, Ethernet, general I/O
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Applications/Examples of results
Various fields requiring precise positioning. Research fields utilizing X-rays. Semiconductor field.
Line up（5）
| Model number | overview |
|---|---|
| FS-1050PX(V) | 10nm resolution (internal scale reading value), vacuum-compatible stage with 50mm stroke |
| FS-1040PX(V) | 10nm resolution (internal scale reading value), vacuum-compatible stage with 40mm stroke |
| FS-1020PX(V) | 10nm resolution (internal scale reading value), vacuum-compatible stage with 20mm stroke |
| FC-511 | Controller for 10nm resolution stage |
| FS-1100PX(V) | 10nm resolution (internal scale reading value), vacuum-compatible stage with 100mm stroke |
catalog（3）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.