"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!
This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, which reduces detection errors. It has a stroke of 50mm with a resolution of 1nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1050SPX (MD) and the high-speed type is FS-1050UPX. (*1) In combination with the feedback stage controller FC-911.
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basic information
Minimum resolution: 1nm Maximum moving speed: 0.5mm/sec (when using FC-911) Stroke: 50mm Compatible controller: FC-911 ■For details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.