"Precision positioning device" with high resolution of 10nm, high positioning repeatability, and excellent position retention after positioning!
This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.
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basic information
It is a more user-friendly and feedback-capable stage. When combined with the feedback stage controller FC-511, it can achieve control with a resolution of 10nm. Despite incorporating a self-developed linear scale, it features a slim and lightweight design. Additionally, high-precision repeat positioning is possible due to full closed-loop control. ■ For more details, please request documentation or download the catalog ■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. The typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
