"Precision positioning device" with high resolution, high positioning repeatability, and excellent position holding capability after positioning!
This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controllers FC-414 or FC-114.
Inquire About This Product
basic information
Minimum resolution: 50nm or 100nm Maximum moving speed: 20mm/sec (when using FC-414 or FC-114) Stroke: 200mm Compatible controllers: FC-414 or FC-114 ■For more details, please request documentation or download the catalog■
Price information
-
Delivery Time
Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
catalog（3）
Download All Catalogs
Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.