"Precision positioning device" with high resolution, high positioning reproducibility, and excellent position retention after positioning!
This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-411 or FC-111.
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basic information
Minimum resolution: 50nm or 100nm Maximum movement speed: 10mm/sec (when using FC-411 or FC-111) Stroke: 50mm Compatible controllers: FC-411 or FC-111 ■For details, please request materials or download the catalog■
Price information
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical application areas include information and communication, optics, semiconductors, and biotechnology. Examples: Positioning during MEMS inspection Delay stage in optical systems Microscope stage
catalog（4）
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CAD data（1）
| Model number | overview | File |
|---|---|---|
| FS-1050X | 50mm stroke, 100nm or 50nm resolution (built-in scale reading) operation |
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
