Usable in a vacuum! Positioning stage for the Z-axis with built-in linear encoder and sub-micron resolution!
This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of either 50nm (*1) or 100nm (*2). It has been treated for outgassing and can be used in a vacuum. Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis configurations, and is equipped with a self-developed linear scale and proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111
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basic information
Minimum resolution: 50nm or 100nm Maximum moving speed: 2mm/sec (when using FC-411 or FC-111) Stroke: 5mm or 10mm Compatible controllers: FC-411 or FC-111 Compatible vacuum level: 10^-4 Pa ■For details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples: Positioning during MEMS inspection Delay stage in optical systems Microscope stage
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
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