High-performance positioning stage with 10nm resolution and 50mm operation, capable of reproducibility using position information from a linear encoder in a vacuum environment.
A stage was created with components that do not outgas for use in a vacuum. Therefore, the stage can be introduced into the vacuum chamber. It features full closed-loop control based on the positional information from an embedded optical linear encoder, providing high-precision repeatability in positioning. It can operate with a 50mm stroke at a resolution of 10nm.
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basic information
- Achieves a thin and lightweight design while incorporating a 5-phase stepping motor, coupling, ball screw, and linear scale. - High-precision repeat positioning is possible with full closed-loop control. - Table size: 120mm x 120mm - Table movement: 50mm - Repeat positioning accuracy: ±20nm - Compatible vacuum level: 10^-4Pa - Minimum resolution: 10nm - Maximum movement speed: 2mm/sec - Compatible controller: FC-511
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Applications/Examples of results
Scanning Electron Microscope X-ray Utilization Technology Ultrafine Processing It is used in inspection devices and experimental equipment that require precise positioning and reproducibility.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.