Usable in a vacuum! Positioning stage with built-in linear encoder and sub-micron resolution.
The stage position is detected using a built-in optical linear encoder, enabling full closed-loop control, which results in high resolution and excellent position reproducibility. It has been treated for outgassing and can be used in a vacuum. It can operate within a range of 100mm, with a resolution of "50nm" or "100nm" depending on the controller.
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basic information
Minimum resolution: 50nm (when using FC-411) : 100nm (when using FC-111) Maximum movement speed: 2mm/sec Stroke: 100mm Compatible controllers: FC-411 or FC-111 Compatible vacuum level: 10^-4 Pa ■□■ For more details, please request documentation or download the catalog ■□■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. The representative fields of use include information and communication, optics, semiconductors, and biotechnology, among others. Examples include: positioning during MEMS inspection, optical system delay stages, microscope stages, scanning electron microscopes, X-ray utilization technologies, and ultra-fine processing. It is used in inspection devices and experimental equipment that require precise positioning and reproducibility.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.