Feedback stage with submicron resolution usable in a vacuum.
The built-in optical linear encoder detects the position of the stage table and feeds the position information back to the controller, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position retention. As a countermeasure against outgassing, lubricants, wires, and motors have been replaced with vacuum-compatible products, allowing for use within a vacuum chamber. It can operate within a range of 20mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).
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basic information
Minimum resolution: 50nm (when using FC-411) : 100nm (when using FC-111) Maximum moving speed: 2mm/sec Stroke: 20mm Compatible controllers: FC-411 or FC-111 Compatible vacuum level: 10^-4 Pa ■For details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. The representative fields of use include information and communication, optics, semiconductors, and biotechnology, among others. Examples include: positioning during MEMS inspection, optical system delay stages, microscope stages, scanning electron microscopes, X-ray utilization technology, and ultra-fine processing. It is utilized in inspection devices and experimental equipment that require precise positioning and reproducibility.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.