Usable in a vacuum! Stage for adjusting rotation direction
It is equipped with an optical linear encoder, allowing it to detect the position of the movable parts of the stage, which enables the controller to perform closed-loop control based on that position information, resulting in excellent position reproducibility. The resolution can be operated at "0.00005" or "0.0001" resolution, depending on the controller. It has been treated for outgassing, making it usable in a vacuum.
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basic information
Minimum resolution: 0.00005° (when using FC-411) : 0.0001° (when using FC-111) Maximum movement speed: 1°/sec Stroke: ±4° Compatible controllers: FC-411 or FC-111 Compatible vacuum level: 10^-4 Pa ■For details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples: Positioning during MEMS inspection Delay stage in optical systems Microscope stage
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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.