Clean robot for small wafer paths!
The "SSCR2090S Series" is a two-axis cylindrical coordinate clean robot designed for super clean rooms. With its compact footprint and lightweight design, it is suitable for small wafer transport within semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Load capacity is 0.1 kgf or less (work only) when converted to the third joint of the arm - Equipped with operation monitoring - Control method is RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.
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【Other Features】 ■ Compatible with SSCR3115S-150-PM unit, can be modified to link arm specification or Z-axis specification ■ Wafer holding through vacuum suction and drop-in ■ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ■ Can accommodate optimal chucking based on the transported items and equipment layout *For more details, please refer to the catalog or feel free to contact us.
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【Application】 ■Small wafer transport in semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, etc. *For more details, please refer to the catalog or feel free to contact us.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."