Achieves excellent dimensional stability and temperature reproducibility even at ultra-high temperatures above 1000℃! A composite of PBN and PG using advanced technology.
Momentive's "PBN Heater" and "High-Temperature Electrostatic Chuck (ESC)" are composites that utilize advanced technologies of electrically insulating pyrolytic boron nitride (PBN) and conductive pyrolytic graphite (PG). Their characteristics of high purity and very low outgassing even at high temperatures are derived from chemical vapor deposition at elevated temperatures. High thermal conductivity and anisotropy provide excellent in-plane uniformity. 【Features】 ■ Ultra-high temperature compatibility (1500°C) ■ Dimensional stability and electrical stability ■ Ability to create temperature gradients on the heater surface ■ Capable of rapid heating and cooling *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
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basic information
【Advantages】 ■ Usable at temperatures above 1500℃ ■ Low outgassing in ultra-high vacuum ■ Inert to many corrosive gases and liquids ■ Not eroded by many molten metals ■ Long lifespan ■ Excellent mechanical properties and thermal shock resistance due to anisotropic crystal structure ■ Stable temperature reproducibility and excellent thermal uniformity ■ Fast thermal response due to small heat capacity ■ Integrated heater-type electrostatic chucks are also possible *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
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Applications/Examples of results
【Applications】 ■ Heater for vacuum processes ■ Heater for epitaxial/ion implantation processes ■ Heater for glass processing (lenses, substrates, etc.) ■ Ferroelectric and superconducting substrate processes ■ Heater for analytical instruments *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
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Company information
Momentive Technologies Japan Co., Ltd. develops, manufactures, and sells high thermal conductivity heat sinks, heaters/electrostatic chucks, ceramic products, and corrosion/heat-resistant coatings. We also handle a wide range of quartz and silicone products. Please feel free to contact us when you need assistance.
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